Surface acoustic wave sensor

ABSTRACT

The present invention provides a surface acoustic wave sensor capable of suitably controlling the flow of a liquid sample onto IDT electrodes. A surface acoustic wave sensor has a piezoelectric substrate, a first IDT electrode and a second IDT electrode which are located on the upper surface of the piezoelectric substrate and are separated from each other while sandwiching a detection part on the piezoelectric substrate therebetween, and the cover which forms the space being on the first IDT electrode, second IDT electrode, and the detection part and straddling them. On the lower surface of the cover, the detection part-facing surface facing the detection part has a smaller contact angle to the liquid sample than that of a pair of electrode-facing surfaces facing the first IDT electrode and second IDT electrode.

RELATED APPLICATIONS

This application is a Continuation application of U.S. patentapplication Ser. No. 14/438,844, filed Apr. 27, 2015, which is a U.S.National Phase Application of PCT/JP2013/070808, filed on Jul. 31, 2013,which claims the benefit of the filing date of Japanese Application No.2012-237819, filed Oct. 29, 2012. The contents of these earlier-filedapplications are hereby incorporated by reference herein in theirentireties.

TECHNICAL FIELD

The present invention relates to a surface acoustic wave sensor which iscapable of measuring a property of a liquid or an ingredient which iscontained in the liquid. Note that, the liquid need only have fluidity.It does not matter even if its viscosity is high.

BACKGROUND ART

Known in the art is a surface acoustic wave sensor which uses a surfaceacoustic wave element to measure the property of a liquid sample oringredients of a liquid sample.

A surface acoustic wave sensor is comprised of a piezoelectric substrateon which is provided a detection part which reacts with an ingredientcontained in a liquid sample on. It measures an electric signal based ona surface acoustic wave (SAW) which is propagated through this detectionpart to there by detect a property or an ingredient of the liquidsample.

A SAW is generated by an IDT electrode comprised of a pair ofcomb-shaped electrodes which are provided on an upper surface of thepiezoelectric substrate. To prevent the IDT electrode from beingimmersed in the liquid sample, it is known to provide a sealing memberwhich forms a closed space over the IDT electrode (for example, PatentLiterature 1).

The sealing member has a partition wall which is supported on the uppersurface of the piezoelectric substrate between the IDT electrode and thedetection part. Due to this, the flow of the liquid sample onto the IDTelectrode is suppressed. In this way, conventionally, the flow of theliquid sample is controlled by a channel wall.

However, the control of the flow of the liquid sample by the channelwall causes various inconveniences. For example, the partition wallwhich is positioned between the IDT electrode and the detection partbecomes a primary factor of propagation loss of the SAW when the SAW ispropagated from the IDT electrode to the detection part.

Further, for example, if the liquid sample is allowed to flow onto theIDT electrode and the channel wall is positioned outside the detectionpart and the IDT electrode, the liquid sample running along the channelwall causes the liquid sample to flow on the IDT electrode prior to onthe detection part. As a result, air bubbles were liable to form on thedetection part.

Therefore, it has been desired to provide a surface acoustic wave sensorcapable of suitably controlling the flow of a liquid sample.

CITATIONS LIST Patent Literature

-   Patent Literature 1: Japanese Patent Publication No. 2006-184011A

SUMMARY OF INVENTION

A surface acoustic wave sensor according to one aspect of the presentinvention has a piezoelectric substrate, a detection part which islocated on an upper surface of the piezoelectric substrate and detects adetection object which is contained in a sample, a pair of IDTelectrodes which are located on the upper surface of the piezoelectricsubstrate while sandwiching the detection part there between, and acover which covers the detection part and the pair of IDT electrodesthrough a space. A lower surface of the cover has a first region whichfaces the detection part and a pair of second regions which are locatedon the two sides relative to the first region in a direction ofalignment of the detection part and the pair of IDT electrodes. Thefirst region has a smaller contact angle to the sample than that of thepair of second regions.

According to the constitution described above, the flow of the liquidsample (liquid-state sample) can be suitably controlled. Note that, thesample (liquid sample), for example, may be one which contains water andmay be one which contains oil. Further, for example, the sample may be asolution and may be sol.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a perspective view showing a SAW sensor according to a firstembodiment of the present invention.

FIG. 2 is a disassembled perspective view of the SAW sensor in FIG. 1.

FIG. 3 is a perspective view showing a sensor chip of the SAW sensor inFIG. 1.

FIG. 4 is a disassembled perspective view showing a sensor chip in FIG.3.

FIG. 5 is a plan view showing an upper surface of a piezoelectricsubstrate of the sensor chip in FIG. 3.

FIG. 6A is a cross-sectional view taken along a VIa-VIa line in FIG. 1,and FIG. 6B is a cross-sectional view taken along a VIb-VIb line in FIG.1.

FIG. 7A to FIG. 7D are cross-sectional views for explaining a method formanufacturing the sensor chip in FIG. 3.

FIG. 8 is a cross-sectional view showing a sensor chip of a SAW sensoraccording to a second embodiment.

FIG. 9 is a cross-sectional view showing a sensor chip of a SAW sensoraccording to a third embodiment.

FIG. 10 is a disassembled perspective view showing a SAW sensoraccording to a fourth embodiment of the present invention.

FIG. 11A is a cross-sectional view taken along an XIa-XIa line in FIG.10, and FIG. 11B is a cross-sectional view taken along an XIb-XIb linein FIG. 10.

FIG. 12A and FIG. 12B are cross-sectional views showing a SAW sensoraccording to a fifth embodiment of the present invention.

FIG. 13 is a cross-sectional view showing a SAW sensor according to asixth embodiment of the present invention.

FIG. 14 is a perspective view for explaining a modification showing theshape of a passage

DESCRIPTION OF EMBODIMENTS

Below, embodiments of a SAW sensor according to the present inventionwill be explained in detail with reference to the drawings. Note that,in the drawings explained below, the same notations will be attached tothe same components. Further, the sizes of the members and the distancebetween the members and so on will be diagrammatically shown and aresometimes different from the actual ones.

Further, in a SAW sensor, any direction may be made upward or downward.However, in the following description, conveniently an orthogonalcoordinate system xyz is defined, and use is made of “upper surface”,“lower surface”, and other terms deeming the positive side of thez-direction as the upper part.

First Embodiment

FIG. 1 is a perspective view showing a SAW sensor 1 according to a firstembodiment.

The SAW sensor 1 is for example formed in a roughly rectangular plateshape as a whole. The thickness thereof is for example 0.5 mm to 3 mm,the length in the x-direction is for example 1 cm to 5 cm, and thelength in the y-direction is for example 1 cm to 3 cm.

The SAW sensor 1 is provided with a first inflow port 3 for taking in aliquid sample and a plurality of terminals 5 which are used forinput/output of electric signals. The first inflow port 3 is for examplepositioned on one end of the rectangular shape, and the plurality ofterminals 5 are for example positioned on the other end of therectangular shape.

The SAW sensor 1 is for example attached to a not shown reader includingan oscillation circuit etc. The attachment is for example carried out byinserting the end part on the terminal 5 side of the SAW sensor 1 into aslot of the reader. Then, the SAW sensor 1 changes an electric signalinput from the reader to any of the plurality of terminals 5 inaccordance with the property or ingredient of the liquid sample takenfrom the first inflow port 3 and outputs the result from any of theplurality of terminals 5 to the reader. The SAW sensor 1 is made forexample a disposable SAW sensor.

The SAW sensor 1 has a base 7 and a sensor chip 9 which is mounted onthe base 7. The sensor chip 9 substantially converts an electric signalin accordance with the liquid sample. The base 7 functions as a packagewhich contributes to improvement of handle ability of the sensor chip 9and so on.

In the base 7, the first inflow port 3 which is already explained and apassage 11 for guiding the liquid sample taken from the first inflowport 3 to the sensor chip 9 are formed. The passage 11 for examplelinearly extends from the first inflow port 3 to the sensor chip 9.Further, the base 7 has the plurality of terminals 5 which are alreadyexplained and wirings 13 connecting the plurality of terminals 5 and thesensor chip 9 (see FIG. 2).

FIG. 2 is a disassembled perspective view of the SAW sensor 1.

The base 7 has for example a lower layer member 15, middle layer member17, and upper layer member 19 which are stacked over each other.

The lower layer member 15 is for example configured the sameconstitution as a printed circuit board. An insulating base 16 thereofis for example comprised of a resin or ceramic as the main constituent.The planar shape of the insulating base 16 is for example the same asthe planar shape of the SAW sensor 1 as a whole. On the upper surface ofthe insulating base 16, the already explained plurality of terminals 5and wirings 13 are formed. The sensor chip 9 is for example fixed to theupper surface of the insulating base 16 by an adhesive agent.

The middle layer member 17 is for example comprised of a resin orceramic or other insulating material. The middle layer member 17 is forexample adhered to the lower layer member 15 by an adhesive agent. Theplanar shape of the middle layer member 17 is made a rectangle which issomewhat shorter than the lower layer member 15 so that the plurality ofterminals 5 are exposed. Further, on one end side of the middle layermember 17, a cutout 17A for forming the first inflow port 3 and passage11 and a first hole part 17B for accommodating the sensor chip 9 areformed. The cutout 17A and the first hole part 17B are connected.

The upper layer member 19 is comprised of for example a hydrophilicfilm. Accordingly, in the upper layer member 19, for example, thewettability with respect to the liquid sample becomes higher comparedwith the lower layer member 15 and middle layer member 17. Note that,the degree of the wettability (or hydrophilicity) with respect to theliquid sample can be measured by a contact angle to the liquid sample asis generally known. As the hydrophilic film, use can be made of acommercially available resin film subjected to a hydrophilic treatment.The resin is for example polyester based or polyethylene based. Theupper layer member 19 is for example adhered to the middle layer member17 by an adhesive agent. The planar shape of the upper layer member 19is made a rectangle which is a bit shorter than the lower layer member15 in the same way as the middle layer member 17. Further, in the upperlayer member 19, a second hole part 19B for exposing the upper surfaceof the sensor chip 9 is formed.

Note that, the SAW sensor 1 for example does not have flexibility. Forexample, at least one of the lower layer member 15, middle layer member17, and upper layer member 19 does not have flexibility.

When the lower layer member 15, middle layer member 17, and upper layermember 19 are stacked, by formation of the cutout 17A in the middlelayer member 17, a passage 11 is formed between the upper surface of thelower layer member 15 and the lower surface of the upper layer member19. Further, by formation of the first hole part 17B and second holepart 19B in the middle layer member 17 and upper layer member 19, aconcave portion for accommodating the sensor chip 9 is constituted.

On the upper surface of the lower layer member 15, a bottom surfacemember 21 is provided at the position where the passage 11 is formed.The upper surface of the bottom surface member 21 forms the bottomsurface of the passage 11. The bottom surface member 21 is for exampleformed by a hydrophilic film in the same way as the upper layer member19. Accordingly, at the bottom surface member 21, the contact angle tothe liquid sample becomes smaller than that at the lower layer member15. The bottom surface member 21 is for example fixed to the uppersurface of the lower layer member 15 by an adhesive agent 22 (see FIG.6A).

In the passage 11, the height in the z-direction is set relativelysmall. For example, the height in the z-direction of the passage 11 is50 μm to 0.5 mm. From the viewpoint of reducing the amount of the liquidsample (for example reducing the amount of collection of blood), theheight of the passage 11 is preferably about 50 μm. Further, asexplained above, at the ceiling surface of the passage 11 (upper surfaceof the passage 11, lower surface of the upper layer member 19) and thebottom surface (lower surface of the passage 11, upper surface of thebottom surface member 21), the contact angle to the liquid sample issmall.

The height in the z-direction of the passage 11 is small, and thecontact angle to the liquid sample is small at the ceiling surface etc.Therefore, when the liquid sample contacts the first inflow port 3, theliquid sample flows toward the sensor chip 9 in the passage 11 due to acapillary phenomenon. That is, in the base 7 of the present embodiment,work of using a micropipette or another implement to suck up the liquidsample and discharging the sucked up liquid sample into the first inflowport 3 is unnecessary.

Note that, the capillary phenomenon may occur if the contact angle ofthe inner surface of the passage is less than 90°. Accordingly, thewettability (hydrophilicity) of the upper layer member 19 and bottomsurface member 21 (hydrophilic films) only have to be high to an extentwhere the contact angle to the liquid sample (this may be represented bywater) becomes less than 90°. Further, from the viewpoint of reliablycausing the capillary phenomenon, the wettability is preferably highenough so that the contact angle becomes less than 60°.

FIG. 3 is a perspective view of the sensor chip 9. Further, FIG. 4 is adisassembled perspective view of the sensor chip 9.

The sensor chip 9 has a piezoelectric substrate 23, a cover 25 whichcovers the piezoelectric substrate 23, and a plurality of pads 27 whichare exposed to their outside and are provided for input/output ofelectric signals. Between the piezoelectric substrate 23 and the cover25, a space 29 into which the liquid sample is introduced is formed. Thespace 29 is connected to the passage 11 of the base 7 through a secondinflow port 31 which is opened in the side surface of the cover 25.

The piezoelectric substrate 23 is for example constituted by a substrateof a single crystal having piezoelectricity such as a lithium tantalate(LiTaO3) single crystal, lithium niobate (LiNbO3) single crystal, orquartz crystal. The planar shape and various dimensions of thepiezoelectric substrate 23 may be suitably set. As an example, thethickness of the piezoelectric substrate 23 is 0.3 mm to 1 mm.

The cover 25 has a cover body 33 (base material) constituting the majorpart thereof and a film 35 which is adhered to the lower surface(ceiling surface) of the cover body 33.

The cover body 33 has a frame 37 which is located on the piezoelectricsubstrate 23 and a lid 39 which is located on the frame 37. An openingvertically penetrating through the frame 37 is closed from the top andthe bottom by the piezoelectric substrate 23 and the lid 39. Due tothis, the space 29 is formed. Further, the second inflow port 31 isformed by interruption of a portion of the frame 37. Note that, theframe 37 and the lid 39 may be formed integrally as well.

The cover body 33 is for example made of a resin or ceramic or otherinsulating material. Preferably, the cover body 33 is made ofpolydimethylsiloxane. By using polydimethylsiloxane, it is easy to giveany shape to the cover body 33, for example, a shape having roundedcorners. Further, if polydimethylsiloxane is used, it is relatively easyto form the ceiling portion and side walls of the cover body 33 thick.The thickness of the lid 39 and the width of the frame 37 (thickness ofthe side walls of the cover body 33) is for example 0.3 mm to 5 mm.

The film 35 is for example constituted by a hydrophilic film in the sameway as the upper layer member 19 and bottom surface member 21.Accordingly, for example, the film 35 has a smaller contact angle to theliquid sample than the cover body 33. Further, the contact angle of theliquid sample on the lower surface thereof is less than 90°, preferablyless than 60°. The film 35 is for example adhered to the lower surfaceof the cover body 33 by an adhesive agent 41. Note that, the film 35 maybe adhered to the lower surface of the cover body 33 without use of theadhesive agent 41 by adhesion of the cover body 33 and/or film 35itself.

In the cover 25, a through hole 43 contributing to evacuation etc. ofthe space 29 is formed. The through hole 43 is for example formed in theupper part of the cover 25 by formation of hole in each of the lid 39,adhesive agent 41, and film 35. This through hole 43 is exposed to theoutside of the base 7 by the upper surface of the sensor chip 9 beingexposed through the second hole part 19B of the upper layer member 19 tothe outside of the base 7 (see FIG. 1 and FIG. 2). Accordingly, thespace 29 is communicated with the outside of the SAW sensor 1 throughthe through hole 43. The through hole 43 is located on the side oppositeto the second inflow port 31 with respect to the space 29.

The pads 27 are for example provided on the upper surface of thepiezoelectric substrate 23 on the outside of the cover 25. Although notparticularly shown, for example, the pads 27 are connected to the padsprovided on the lower layer member 15 by bonding wires and consequentlyconnected to the wirings 13.

The height in the z-direction of the space 29 (in more detail, thedistance between a metal film 55 which will be explained later and thefilm 35) is set relatively small. For example, in the same way as thepassage 11, the height is 50 μm to 0.5 mm and preferably about 50 μm.Further, on the ceiling surface of the space 29, in the same way as theceiling surface etc. of the passage 11, the contact angle to the liquidsample is small due to the film 35. Accordingly, the liquid sampleguided in the passage 11 to the second inflow port 31 due to thecapillary phenomenon is introduced into the space 29 due to thecapillary phenomenon.

When the liquid sample is introduced into the space 29, air which hasoriginally existed in the space 29 is released to the outside throughthe through hole 43. Due to this, the liquid sample becomes easier toenter into the space 29. Note that, the through hole 43 can dischargeair in the passage 11 and space 29 even at the time when the liquidsample flows in the passage 11.

FIG. 5 is a plan view showing the upper surface of the piezoelectricsubstrate 23. Note that, in FIG. 5, the space 29, second inflow port 31,and passage 11 are also indicated by two-dotted chain lines.

On the upper surface of the piezoelectric substrate 23, in a regioncontained in the space 29, a first IDT electrode 45, a second IDTelectrode 47, and a short-circuiting electrode 51 are formed.

The first IDT electrode 45 is for generating a predetermined SAW, whilethe second IDT electrode 47 is for receiving the SAW generated at thefirst IDT electrode 45. The second IDT electrode 47 is arranged on thepath of propagation of the SAW which is generated in the first IDTelectrode 45 so that the second IDT electrode 47 can receive the SAWgenerated in the first IDT electrode 45.

Each of the first IDT electrode 45 and second IDT electrode 47 has apair of comb-shaped electrodes. Each comb-shaped electrode has a bus barand a plurality of electrode fingers extending from the bus bar.Further, the pair of comb-shaped electrodes are arranged so that theirplurality of electrode fingers mesh with each other. The first IDTelectrode 45 and second IDT electrode 47 constitute a transversal typeIDT electrode.

Using the numbers of electrode fingers of the first IDT electrode 45 andsecond IDT electrode 47, distance between adjacent electrode fingers,intersection width of electrode fingers, and so on as parameters, afrequency characteristic can be set. As the SAW excited by the IDTelectrode, a Rayleigh wave, Love wave, Leaky wave, and so on exist. Anyof them may be utilized. The sensor chip 9 for example utilizes a Lovewave.

An elastic member for suppressing reflection of the SAW may be providedin a region on the outside of the first IDT electrode 45 and the secondIDT electrode 47 in the propagation direction of the SAW as well. Thefrequency of the SAW can be set within a range of for example severalmegahertz (MHz) to several gigahertz (GHz). In particular, severalhundred MHz to 2 GHz is practical, and the frequency can inducereduction of size of the piezoelectric substrate 23, consequentlyreduction of size of the sensor chip 9.

The first IDT electrode 45 and the second IDT electrode 47 are connectedto the pads 27 through the wirings 49. Through these pads 27 and wirings49, electric signals are input to the first IDT electrode 45, whileelectric signals are output from the second IDT electrode 47.

The short-circuiting electrode 51 is arranged in the region between thefirst IDT electrode 45 and the second IDT electrode 47 in the uppersurface of the piezoelectric substrate 23, defined as the “detectionregion 23A”. This short-circuiting electrode 51 is for electricallyshort-circuiting the portion which becomes the path of propagation ofthe SAW in the upper surface of the piezoelectric substrate 23. Byproviding this short-circuiting electrode 51, depending on the type ofthe SAW, the loss of the SAW can be made smaller. Note that, it isconsidered that the effect of suppression of loss by theshort-circuiting electrode 51 is high particularly when a leaky wave isused as the SAW.

The short-circuiting electrode 51 is given for example a rectangularshape which extends along the path of propagation of the SAW which runsfrom the first IDT electrode 45 to the second IDT electrode 47. Thewidth of the short-circuiting electrode 51 in a direction (x-direction)perpendicular to the propagation direction of the SAW is for example thesame as the intersection width of the electrode fingers of the first IDTelectrode 45. Further, the end part of the short-circuiting electrode 51on the first IDT electrode 45 side in a direction (y-direction) parallelto the propagation direction of the SAW is located at a place which isseparated from the center of the electrode finger which is located atthe end part of the first IDT electrode 45 by exactly the amount of ahalf-wave length of the SAW. In the same way, the end part of theshort-circuiting electrode 51 on the second IDT electrode 47 side in they-direction is located at a place which is separated from the center ofthe electrode finger which is located at the end part of the second IDTelectrode 47 by exactly the amount of a half-wave length of the SAW.

The short-circuiting electrode 51 may be placed in an electricallyfloating state, or a pad 27 for ground potential may be provided and theshort-circuiting electrode 51 may be connected to this and made a groundpotential. When the short-circuiting electrode 51 is made the groundpotential, propagation of direct waves due to electromagnetic couplingbetween the first IDT electrode 45 and the second IDT electrode 47 canbe suppressed.

The first IDT electrode 45, second IDT electrode 47, short-circuitingelectrode 51, wirings 49, and pads 27 are for example made of gold,aluminum, an alloy of aluminum and copper, or the like. Further, theseelectrodes may be given a multilayer structure as well. When amultilayer structure is given, for example, the first layer may be madeof titanium or chromium, the second layer may be made of aluminum, analuminum alloy, or gold, and further titanium or chromium may belaminated as the uppermost layer.

FIG. 6A is a cross-sectional view taken along a VIa-VIa line in FIG. 1,while FIG. 6B is a cross-sectional view taken along a VIb-VIb line inFIG. 1.

On the upper surface of the piezoelectric substrate 23, a protectivefilm 53, and a metal film 55 which is located on the protective film 53are provided.

The protective film 53 covers the first IDT electrode 45, second IDTelectrode 47, short-circuiting electrode 51, and wirings 49 andcontributes to prevention of oxidation of these electrodes and wirings.The protective film 53 is made of for example an inorganic insulatingmaterial. The inorganic insulating material is for example siliconoxide, aluminum oxide, zinc oxide, titanium oxide, silicon nitride, orsilicon. In the SAW sensor 1, use is made of silicon oxide (SiO2) as theprotective film 53.

The protective film 53 is formed over the entire upper surface of thepiezoelectric substrate 23 but exposes the pads 27. The thickness of theprotective film 53 (the height from the upper surface of thepiezoelectric substrate 23) is for example thicker than the thickness ofthe first IDT electrode 45 and second IDT electrode 47. Further, thethickness of the protective film 53 is for example 200 nm to 10 μm. Notethat, it is not always necessary to form the protective film 53 acrossthe entire upper surface of the piezoelectric substrate 23. For example,the protective film 53 may be formed to coat only the vicinity of thecenter of the upper surface of the piezoelectric substrate 23 so thatthe region along the periphery of the upper surface of the piezoelectricsubstrate 23 including the pads 27 is exposed.

The metal film 55 is located between the first IDT electrode 45 and thesecond IDT electrode 47 on the protective film 53. Further, the metalfilm 55 for example spreads from the second inflow port 31 toward thedeepest part of the space 29. The metal film 55 has for example atwo-layer structure of chromium and gold which is formed on thechromium. On the surface of the metal film 55, for example aptamers madeof nucleic acids or peptides are fixed.

When the liquid sample contacts the metal film 55 to which the aptamersare fixed, a specific target substance (detection object) in the liquidsample combines with the aptamers corresponding to that target substanceand the weight of the metal film 55 changes. As a result, a phasecharacteristic etc. of the SAW which is propagated from the first IDTelectrode 45 to the second IDT electrode 47 change. Accordingly, basedon the change of the phase characteristic etc., the property oringredients of the liquid sample can be checked. Note that, theprotective film 53 can contribute to also improvement of measurementaccuracy of the liquid sample by shifting the center of propagation ofSAW from the vicinity of the upper surface of the piezoelectricsubstrate 23 to the upper part thereof.

Here, when the liquid sample flows up to the top of the first IDTelectrode 45 and second IDT electrode 47, an inconvenience such as adrop of the detection sensitivity of the SAW sensor 1 and so on isliable to occur. Therefore, provision of a partition wall on thepiezoelectric substrate 23 so as to partition the space 29 between themetal film 55 and each of the IDT electrodes may be considered. In thiscase, however, an inconvenience occurs such as propagation loss of theSAW and so on due to the partition wall when the SAW is propagatedbetween the IDT electrodes and the metal film 55. Therefore, in thepresent embodiment, the flow of the liquid sample is restricted by thefilm 35. As a result, the flow of the liquid sample onto the IDTelectrodes is suppressed without providing the partition wall.Specifically, this is as follows.

As shown in FIG. 5 and FIG. 6, the film 35 is set with the width(y-direction) thereof smaller than the width of the space 29, and facesthe metal film 55 but does not face the first IDT electrode 45 andsecond IDT electrode 47. The first IDT electrode 45 and second IDTelectrode 47 are faced by portions of the cover body 33 which areexposed from the film 35. Further, as already explained, the film 35(strictly speaking, the main surface thereof) has a smaller contactangle to the liquid sample than the cover body 33.

In other words, the cover 25, on its lower surface, has second regions(as an example, electrode-facing surfaces 25A (FIG. 6B)) facing thefirst IDT electrode 45 and the second IDT electrode 47 and a firstregion (as an example, a detection part-facing surface 25B (FIG. 6A andFIG. 6B)) facing the detection part (detection region 23A) and having asmaller contact angle to the liquid sample than the electrode-facingsurface 25A.

Accordingly, it becomes easier to guide the liquid sample to the top ofthe detection region 23A than the top of the IDT electrodes. As aresult, flow of the liquid sample on the IDT electrodes can besuppressed without providing a partition wall between the IDT electrodesand the metal film 55.

From the viewpoint of suitably obtaining this action, a difference ofcontact angle to the liquid sample between the detection part-facingsurface 25B and the electrode-facing surfaces 25A is preferably acertain degree of magnitude. For example, the difference of contactangle to the liquid sample is preferably 20° or more and furtherpreferably 40° or more.

Further, in order to supply the liquid sample sufficiently with themetal film 55 in the y-direction, preferably the film 35 covers theentire metal film 55 in the y-direction and is not overlapped with thefirst IDT electrode 45 and second IDT electrode 47. That is, the widthof the film 35 (y-direction) is preferably at least the width of themetal film 55 (y-direction) and preferably less than the distancebetween the first IDT electrode 45 and the second IDT electrode 47. Notethat, the width of the film 35 is for example constant over the flowdirection (x-direction).

Further, the film 35, in the x-direction, preferably extends from thesecond inflow port 31 (more preferably the edge on the second inflowport 31 side of the lid 39) to the position beyond the detection region23 a. In this case, the liquid sample which arrives at the second inflowport 31 from the passage 11 can be suitably guided to the top of thedetection region 23A. Further, preferably the through hole 43 is formedat a position beyond the detection region 23A so that the air can besuitably discharged until the liquid sample goes beyond the detectionregion 23A.

The film 35 is adhered to the lower surface of the cover body 33 whichis formed in a flat planar shape, therefore a step is formed withrespect to the lower surface of the cover body 33 due to the thicknessof the film 35 and adhesive agent 41. The height of the step is forexample 1/2 to 3/2 of the distance between the film 35 and the metalfilm 55 or for example 50 μm to 300 μm. Further, the film 35 is forexample formed by cutting a film having a main surface subjected tohydrophilization. Its cut cross-section (side surface) has a lowerhydrophilicity compared with the main surface (lower surface), that is,has a larger contact angle to the liquid sample.

Accordingly, the liquid sample wetting the film 35 has a low possibilitythat passes beyond the side surfaces of the film 35 and wet the coverbody 33 (electrode-facing surfaces 25A). As a result, for example, evenif the hydrophilicity of the cover body 33 is not set lower so much, thepossibility of the liquid sample spreading onto the IDT electrodesreduces, and consequently the selection of the materials of the coverbody 33 grows.

In FIG. 5 and FIG. 6, the positional relationships of the passage 11 andspace 29 etc. are exemplified. As shown in FIG. 5, the width of thepassage 11 (y-direction) is preferably not more than the width of thefilm 35 (y-direction). In this case, the amount of the liquid sample inthe space 29 which is provided for measurement can be made larger whilereducing the total amount of the liquid sample. For example, when thewidth of the film 35 is about 3 mm, the width of the passage 11 ispreferably 50 μm to 3 mm, more preferably 50 μm to 1 mm, furthermorepreferably about 50 μm.

As shown in FIG. 6A, the ceiling surface of the passage 11 (lowersurface of the upper layer member 19) is adjacent to the detectionpart-facing surface 25B (lower surface of the film 35) in the planedirection. Accordingly, the liquid sample can be expected to smoothlyflow from the passage 11 to the space 29. Note that, preferably theceiling surface of the passage 11 and the detection part-facing surface25B are substantially flush. Adjustment for making them flush ispossible by for example adjusting the thickness of the adhesive agent41. The ceiling surface of the passage 11 may be substantially flushwith the lower surface of the cover body 33 in a case where thethicknesses of the film 35 and adhesive agent 41 can be ignored.

Note that, when referring to “flush” or “in the same plane”, this shallbe deemed to include a case where two planes are not continuous (twoplanes are adjacent to each other through a gap) like with therelationship between the ceiling surface of the passage 11 and thedetection part-facing surface 25B described above.

As shown in FIG. 6A, the bottom surface of the passage 11 (upper surfaceof the bottom surface member 21) is adjacent to the upper surface of themetal film 55 in the plane direction. Accordingly, the liquid sample isexpected to smoothly flow from the passage 11 to the space 29. Notethat, preferably the bottom surface of the passage 11 and the uppersurface of the metal film 55 are substantially flush. Adjustment formaking them flush is possible by for example adjusting the thickness ofthe adhesive agent 22. The bottom surface of the passage 11 may besubstantially flush with the upper surface of the protective film 53 ina case where the thicknesses of the metal film 55 can be ignored.

The ceiling surface and bottom surface of the passage 11 are comprisedof hydrophilic films, therefore their contact angles to the liquidsample are smaller than those at the electrode-facing surfaces 25A(cover body 33) in the ceiling surface of the space 29. Accordingly, inthe SAW sensor 11, the liquid sample can be suitably guided to the space29 in the passage 11, while wetting of the electrode-facing surfaces 25Aby the liquid sample is suppressed. Either of the contact angles to theliquid sample at the ceiling surface and bottom surface of the passage11 and the contact angle to the liquid sample at the detectionpart-facing surface 25B (film 35) in the ceiling surface of the space 29may be higher or they may be the same degree.

FIG. 7A to FIG. 7D are cross-sectional views for explaining the methodof manufacturing the sensor chip 9. The manufacturing process advancesin order from FIG. 7A to FIG. 7D.

First, as shown in FIG. 7A, on the upper surface of the piezoelectricsubstrate 23, the first IDT electrode 45, second IDT electrode 47,short-circuiting electrode 51, wirings 49, and pads 27 etc. are formed.Specifically, first, by a sputtering method, vapor deposition process,CVD (chemical vapor deposition) process, or other thin film formingmethod, a metal layer is formed on the upper surface of thepiezoelectric substrate 23. Next, the metal layer is patterned by aphotolithography process using a reduced projection exposure apparatus(stepper) and a RIE (reactive ion etching) apparatus. By patterning themetal layer, all kinds of electrodes, wirings, etc. are formed.

After the first IDT electrode 45 etc. are formed, the protective film 53is formed as shown in FIG. 7B. Specifically, first, a thin film whichbecomes the protective film 53 is formed. The thin film forming methodis for example the sputtering method or CVD process. Next, a portion ofthe thin film is removed by RIE or the like so that the pads 27 areexposed. Due to this, the protective film 53 is formed.

After the protective layer 53 is formed, the metal film 55 is formed asshown in FIG. 7C. Specifically, by the vapor deposition process orsputtering process or the like, a metal material is formed on theprotective film 53 through a mask which is not shown and has an openinggiven the same shape as that of the metal film 55. After that, aptamersare arranged on the metal film 55. Alternatively, aptamers may be fixedonto the metal film 55 by chemical bonding or the like.

Finally, as shown in FIG. 7D, the cover 25 is attached to thepiezoelectric substrate 23. Specifically, first, a fluid material madeof polydimethylsiloxane or the like is poured into a predetermined mold,then this is hardened to thereby form the cover body 33. Note that, inthis method of formation, the frame 37 and the lid 39 are integrallyformed. Next, the film 35 is adhered to the lid 39 by the adhesive agent41. After that, in the cover body 33, at least a portion which willcontact the protective film 53 is subjected to an oxygen plasmatreatment, the cover body 33 is brought into contact with the protectivefilm 53, and the cover body 33 is joined with the piezoelectricsubstrate 23.

Note that, in this way, in the case where an oxygen plasma treatment isapplied to the cover body 33 made of polydimethylsiloxane and the coverbody 33 is brought into contact with the protective film 53 made ofSiO2, the cover body 33 and the protective film 53 can be bonded withoutuse of an adhesive agent or the like. The reason for this is not alwaysapparent, but it is considered that they can be bonded by formation of acovalent bond of Si and O between the cover body 33 and the protectivefilm 53. Note, the cover body 33 may be bonded to the protective film 53by using an adhesive agent as well.

The sensor chip 9 formed as described above is then held in the base 7.For example, first, the sensor chip 9 is fixed to the lower layer member15 by an adhesive agent and electrically connected with the wirings 13by wire bonding. After that, the middle layer member 17 and the upperlayer member 19 are adhered to the lower layer member 15, resulting inthat the sensor chip 9 being held in the base 7.

As described above, in the present embodiment, the SAW sensor 1 has thepiezoelectric substrate 23, the first IDT electrode 45 and second IDTelectrode 47 which are located on the upper surface of the piezoelectricsubstrate 23 and are separated from each other while sandwiching thedetection part (detection region 23A) on the piezoelectric substrate 23there between, and the cover 25 which forms the space 29 being on thefirst IDT electrode 45, second IDT electrode 47, and detection part andstraddling them. On the lower surface of the cover 25, the detectionpart-facing surface 25B (lower surface of the film 35) facing thedetection part has a smaller contact angle to the liquid sample thanthat of a pair of electrode-facing surfaces 25A (lower surface of thecover body 33) facing the first IDT electrode 45 and second IDTelectrode 47.

Accordingly, as already explained, the width of the liquid sample(y-direction) in the space 29 can be controlled according to the widthof the detection part-facing surface 25B (y-direction). As a result, forexample, it is not necessary to provide a partition wall between the IDTelectrodes and the detection part for preventing the liquid sample fromflowing onto the IDT electrodes.

Since a partition wall is not provided, the propagation loss of the SAWis reduced, and an SN ratio is improved. For example, when a partitionwall is formed by an epoxy resin, the width of the partition wall can bemade thin down to about 25 μm. However, even in a case where the widthis made thin down to that, occurrence of a propagation loss of about 5dB is confirmed. On the other hand, according to the SAW sensor 1, sincethere is no partition wall, the propagation loss can be improved by 5 dBor more compared with the case where the partition wall is formed by anepoxy resin. Further, there also exists the advantage that the shape ofthe frame 37 for forming the partition wall is simplified. As a result,in a case where the frame 37 and the lid 39 are separately formed,bonding of them is facilitated. For example, the adhesive agent used forbonding is less liable to be exuded to the top of the detection region23A. Further, since the liquid sample does not contact the partitionwall, there is no necessity of applying treatment to the partition wallin order to suppress nonspecific absorption. Since there is no need tosecure an area large enough to arrange the partition wall between themetal film 55 and the IDT electrodes either, it is possible to make thedistance between the metal film 55 and the IDT electrodes shorter, andfacilitate improvement of the detection accuracy as well.

Further, the thickness of the liquid sample is defined according to theheight of the space 29 (distance between the metal film 55 and the film35), while the width of the liquid sample is defined according to thewidth of the film 35. Therefore, it is possible to keep the mass of theliquid sample in the detection region 23A constant, and suppressmeasurement error due to variation of mass of the liquid sample as well.

Note that, the SAW sensor 1 may be one allowing the liquid sample toflow onto the IDT electrodes as well. Even in this case, various effectsare exhibited because the detection part-facing surface 25B (firstregion) has a smaller contact angle to the liquid sample than those atthe electrode-facing surfaces 25A (pair of second regions which arepositioned at the two sides of the detection part-facing surface 25B inthe direction of alignment (y-direction) of the detection part and theIDT electrodes).

For example, if the contact angles to the liquid sample are equalbetween the detection part-facing surface 25B and the electrode-facingsurfaces 25A, by flow of the liquid sample along the inner wall of thepassage 11 or space 29, the liquid sample flows onto the IDT electrodesprior to the top of the detection part-facing surface 25B. As a result,air bubbles are liable to form on the detection part. However, by makingthe contact angle to the liquid sample at the detection part-facingsurface 25B smaller than those at the electrode-facing surfaces 25A andmaking the liquid sample flow onto the detection part with a higherpriority, formation of such air bubbles is suppressed.

Second Embodiment

FIG. 8 is a cross-sectional view showing a sensor chip 209 of a SAWsensor according to a second embodiment. Note that, the cross-sectionalview corresponds to a portion of FIG. 6B.

The sensor chip 209 differs from the sensor chip 9 in the firstembodiment only in the point that a coating layer 235 is provided inplace of the film 35 and adhesive agent 41. That is, in the sensor chip209, at the lower surface of a cover 225, electrode-facing surfaces 225Afacing the first IDT electrode 45 and the second IDT electrode 47 areconstituted by surfaces of the cover body 33 (base material) on whichthe coating layer 235 is not arranged, and a detection part-facingsurface 225B facing the detection part (detection region 23A) isconstituted by a surface of the cover body 33 on which the coating layer235 is arranged.

The coating layer 235 is formed by applying a hydrophilization treatmentto the cover body 33 (base material). For example, in the cover body 33,in the region which becomes the detection part-facing surface 25B,ashing is performed by oxygen plasma, a silane coupling agent is coated,and finally polyethylene glycol is coated. Note that in this case, thecoating layer 235 is constituted by polyethylene glycol. Other thanthis, it may be surface treated by using a treatment agent havingphosphorylcholine to form a coating layer 235 made of phosphorylcholineas well.

The coating layer 235 is made of a material having a higherhydrophilicity than the material for the cover body 33. Accordingly, onthe surface of the cover body 33 on which the coating layer 235 isarranged, the wettability with respect to the liquid sample becomeshigher (that is, the contact ability with the liquid sample is smaller)than that on the surface on which it is not arranged.

The coating layer 235 is preferably arranged (superimposed) on the coverbody 33 to an extent forming a layer state. The thickness thereof isthin compared with the total thickness of the film 35 and adhesive agent41 in the first embodiment. For example, it is 5 A to 50 nm. Note that,the thickness of the frame 37 (height of the space 29 on the IDTelectrodes) may be the same as that in the first embodiment or may bemade thinner than the latter by the amount of reduction of thicknesswhich is achieved by making the coating layer thinner than the film 35and adhesive agent 41.

As described above, in the present embodiment, in the same way as thefirst embodiment, on the lower surface of the cover 25 which forms thespace 29 on the first IDT electrode 45, second IDT electrode 47, anddetection part so as to straddle them, the detection part-facing surface225B facing the detection part has a smaller contact angle to the liquidsample than that of the pair of electrode-facing surfaces 225A facingthe pair of IDT electrodes.

Accordingly, in the present embodiment as well, the same effects asthose by the first embodiment are exhibited. For example, it is possibleto control the width of the liquid sample (y-direction) in the space 29according to the width (y-direction) of the detection part-facingsurface 225B, and flow of the liquid sample onto the IDT electrodes canbe suppressed without providing a partition wall.

Further, in the present embodiment, compared with the first embodiment,for example, the coating layer is thin as explained above, therefore athinner sensor chip 209 can be achieved. Note that, in the firstembodiment, compared with the present embodiment, for example,simplification of the manufacturing process and reduction of cost can beexpected, further, as already explained, due to the low wettability stepwhich is formed by the film 35, the effect of suppression of flow of theliquid sample onto the IDT electrodes can be expected.

Third Embodiment

FIG. 9 is a cross-sectional view showing a sensor chip 309 of a SAWsensor according to a third embodiment. Note that, the cross-sectionalview corresponds to a portion in FIG. 6B.

The sensor chip 309 differs from the sensor chip 9 in the firstembodiment only in the point that a first groove 325R is formed byelectrode-facing surfaces 325A facing IDT electrodes projecting to thepiezoelectric substrate 23 side more than a detection part-facingsurface 325B facing the detection part.

Specifically, on the lower surface of a lid 339 of a cover body 333, asecond groove 333R deeper than the total thickness of the film 35 andadhesive agent 41 is formed. By accommodation of the adhesive agent 41and film 35 in this second groove 333 r, the first groove 325 r definingthe lower surface of the film 35 as its bottom surface is constituted.

The width and length of the second groove 333 r are for example equal tothe width and length of the film 35. In the same way as the firstembodiment, the film 35 preferably extends up to the edge on the passage11 (see FIG. 1) side of the lid 339, and consequently preferably thesecond groove 333 r (first groove 325 r) also extends up to the edge.Note, the second groove 333 r may be longer than the film 35 and a bitbroader.

An interval between the detection part-facing surface 325 b (film 35)and the metal film 55 (thickness of liquid sample) is for example thesame as that in the first embodiment. From another viewpoint, the frame337 in the present embodiment is thinner than the frame 37 in the firstembodiment, and the interval between the electrode-facing surfaces 325 aand the protective film 53 in the present embodiment is smaller than theinterval between the electrode-facing surfaces 25 a and the protectivefilm 53 in the first embodiment.

As described above, in the present embodiment, in the same way as thefirst embodiment, on the lower surface of the cover 325 which forms thespace 29 on the first IDT electrode 45, second IDT electrode 47, anddetection part so as to straddle them, the detection part-facing surface325 b facing the detection part has a smaller contact angle to theliquid sample than the pair of electrode-facing surfaces 325 a facingthe pair of IDT electrodes.

Accordingly, in the present embodiment as well, the same effects asthose by the first and second embodiments are exhibited. For example,the width of the liquid sample (y-direction) in the space 329 can becontrolled according to the width of the detection part-facing surface325 b (y-direction), and flow of the liquid sample onto the IDTelectrodes can be suppressed without providing a partition wall.

Further, the liquid sample between the detection part-facing surface 325b and the metal film 55 contacts the side surfaces of the first groove325 r at its side surfaces. Accordingly, the liquid sample is reduced inarea contacting the gas (for example air) surrounding the SAW sensor. Asa result, evaporation of the liquid sample is suppressed, therefore therequired amount of the liquid sample can be suppressed.

Note that, in the present embodiment, in the same way as the firstembodiment, the detection part-facing surface 325 b was constituted bythe film 35. However, the detection part-facing surface 325 b may beconstituted by a coating layer in the same way as the second embodimentas well. In this case, the coating layer may be provided on only thebottom surface of the first groove 325 r (second groove 333 r) or may beprovided on the side surfaces in addition to the bottom surface.

Fourth Embodiment

FIG. 10 is a disassembled perspective view showing a SAW sensor 401according to a fourth embodiment. FIG. 11A is a cross-sectional viewtaken along an XIa-XIa line in FIG. 10, while FIG. 11B is across-sectional view taken along an XIb-XIb line in FIG. 10.

In the first embodiment, the sensor chip 9 had the cover 25. Contrary tothis, the sensor chip 409 in the fourth embodiment does not have a cover25. Further, in the SAW sensor 401 in the fourth embodiment, the middlelayer member 17 and an upper layer member 419 constitute a cover 425.Specifically, this is as follows.

The sensor chip 409 has roughly a constitution achieved by eliminatingthe cover 25 from the sensor chip 9. That is, as shown in FIG. 11, thesensor chip 409, in the same way as the sensor chip 9, has thepiezoelectric substrate 23, and has the first IDT electrode 45, secondIDT electrode 47, wirings 49, pads 27, and metal film 55 etc. on thepiezoelectric substrate 23.

Note, in the fourth embodiment, the piezoelectric substrate 23 does notneed space for arranging the cover 25, therefore may be made smaller insize than the piezoelectric substrate 23 in the first embodiment. Thefirst hole part 17 b in the middle layer member 17 may be made smallerin accordance with this.

In the sensor chip 409, the short-circuiting electrode 51 and protectivefilm 53 are omitted. However, the sensor chip 409 may have theshort-circuiting electrode 51 and protective film 53 in the same way asthe sensor chip 9 as well.

The SAW sensor 401, in the same way as the SAW sensor 101, has a base407 constituted by stacking the lower layer member 15, middle layermember 17, and upper layer member 419. The constitutions of the lowerlayer member 15 and middle layer members 17 are roughly the same asthose in the first embodiment.

In the upper layer member 419, unlike the first embodiment, the secondhole part 19 b (FIG. 1) is not formed. Accordingly, in the upper layermember 419, a portion superimposed on the first hole part 17 b in themiddle layer member 17 covers the upper surface of the sensor chip 409(piezoelectric substrate 23). In this way, the cover 425 is constitutedby the middle layer member 17 and the upper layer member 419. Note that,only the upper layer member 419 may be regarded as the memberconstituting the cover as well.

The cover 425, in the same way as the cover 25 in the first embodiment,has a cover body 433 and a film 435 which is adhered to the lowersurface of the cover body 433 by an adhesive agent 441. Further, in thecover 425, a through hole 443 for exhaust is formed.

The ceiling portion of the cover body 433 (upper layer member 419) isfor example formed by a hydrophilic film in the same way as the upperlayer member 19 in the first embodiment. Further, the film 435 isconstituted by a hydrophilic film having a higher hydrophilicity thanthe cover body 433. Note that, the upper layer member 419 may beconstituted by a material having a relatively low wettability (forexample the same material as that for the lower layer member 15 andmiddle layer members 17) as well.

Further, the film 435 forms a detection part-facing surface 425 b facingthe detection part (metal film 55). The portions of the cover body 433to which the film 435 is not adhered form electrode-facing surfaces 425a facing the first IDT electrode 45 and the second IDT electrode 47.

The film 435, in the x-direction, extends up to not only the rangefacing the piezoelectric substrate 23, but also the passage 11 forguiding the liquid sample to the space 29 on the piezoelectric substrate23. Due to this, the detection part-facing surface 425 b and the ceilingsurface of the passage 11 are flush.

Note that, the thickness of the middle layer member 17 may be suitablyset so that the heights of the space 29 and the passage 11 becomesuitable.

As described above, in the present embodiment, on the ceiling surface ofthe cover 425 constituting the space 29, the detection part-facingsurface 425 b facing the detection part has a smaller contact angle tothe liquid sample than that at the pair of electrode-facing surfaces 425a facing the pair of IDT electrodes.

Accordingly, in the present embodiment as well, the same effects asthose by the first embodiment are exhibited. For example, the width ofthe liquid sample in the space 29 (y-direction) can be controlledaccording to the width of the detection part-facing surface 426 b(y-direction), and flow of the liquid sample onto the IDT electrodes canbe suppressed without providing a partition wall.

Further, in the present embodiment, the cover 425 has the middle layermember 17 which is located on the lower layer member 15 and is locatedin the lateral direction of the piezoelectric substrate 23 and has theupper layer member 419 which is located on the middle layer member 17and covers the upper surface of the piezoelectric substrate 23.Accordingly, for example, the configuration is simplified compared withthe first embodiment.

Note that, in the present embodiment, in the same way as the firstembodiment, the detection part-facing surface 425 b was constituted by afilm. However, in the same way as the second embodiment, the detectionpart-facing surface 425 b may be constituted by a coating layer as well.In this case, the coating layer may be provided only on the detectionpart-facing surface 425 b or may be provided also on the ceiling surfaceof the passage 11 in the same way as the film 435.

Fifth Embodiment

FIG. 12A and FIG. 12B are cross-sectional views showing a SAW sensor 501according to a fifth embodiment and correspond to FIG. 11A and FIG. 11B.

The SAW sensor 501 is different from the SAW sensor 401 in the fourthembodiment only in the constitution of the middle layer member.Specifically, this is as follows.

The middle layer member 517 in the SAW sensor 501 has a first layer 518Alocated on the lower layer member 15 and a second layer 518B located onthe former.

A planar shape of the second layer 518B is for example the same as theplanar shape of the middle layer member 17 in the fourth embodiment.

The planar shape of the first layer 518A is for example made a shapewhere, in the planar shape of the second layer 518B, the hole partconstituting the space 29 is made small in the y-direction (thedirection of alignment of the detection part and IDT electrodes) and acutout portion forming the passage 11 is eliminated.

Accordingly, as shown in FIG. 12B, in the y-direction, the first layer518A is nearer the piezoelectric substrate 23 than the second layer518B. Further, a portion (exposed surface 518 a) of the upper surface ofthe first layer 518A is exposed in the space 29 from the second layer518B.

Further, as shown in FIG. 12A, the upper surface of the first layer 518Ais exposed from the cutout for forming the passage 11 in the secondlayer 518B and constitutes the bottom surface of the passage 11. Notethat, in the present embodiment, the bottom surface member 21 whichconstituted the bottom surface of the passage 11 in the first embodimentis not provided.

The upper surface of the first layer 518A (at least the exposed surfacefrom the second layer 518B) is constituted so that the contact angle tothe liquid sample becomes relatively small. For example, the uppersurface of the first layer 518A is constituted by a hydrophilic film ora coating layer is arranged on the upper surface of the first layer518A, so the contact angle to the liquid sample is made small at theupper surface of the first layer 518A. The contact angle to the liquidsample at the upper surface of the first layer 518A is for examplesmaller than the contact angles to the liquid sample at theelectrode-facing surfaces 425 a and is larger than the contact angle tothe liquid sample at the detection part-facing surface 415 b.

As described above, in the present embodiment, the middle layer member517 has the first layer 518A and second layer 518B, and the first layer518A is nearer the piezoelectric substrate 23 than the second layer 518Bin the y-direction.

Accordingly, for example, in a constitution predicated on the liquidsample being filled in the entire space 29, the amount of liquid samplecan be reduced compared with the fourth embodiment.

Further, in the present embodiment, the exposed surface 518 a which is aportion of the upper surface of the first layer 518A and is exposed fromthe second layer 518B by the first layer 518A being nearer thepiezoelectric substrate 23 than the second layer 518B has a smallercontact angle to the liquid sample than the electrode-facing surfaces425 a and has a larger contact angle to the liquid sample than thedetection part-facing surface 425 b.

Accordingly, for example, in a constitution predicated on the liquidsample being filled in the entire space 29, the liquid sample can beeasily filled in the entire space 29 while making the liquid sample flowto the detection part-facing surface 425 b with a higher priority.

Sixth Embodiment

FIG. 13 is a cross-sectional view showing a SAW sensor 601 according toa sixth embodiment and corresponds to a portion in FIG. 12A.

In the first to fifth embodiments, the inflow port (3 etc.) was formedin the side surface of the base (7 etc.) and the through hole (43 etc.)for exhaust was formed in the upper surface of the base. In the sixthembodiment, conversely to this, an inflow port 603 is opened in theupper surface of a base 607, and a through hole 643 for exhaust isopened in the side surface of the base 607. Specifically, this is asfollows.

In the SAW sensor 601, for example, in the same way as the fourth andfifth embodiments, the sensor chip 409 does not have a cover, and acover covering the piezoelectric substrate 23 is constituted by an upperlayer member 619. The inflow port 603 is formed in the upper layermember 619.

Further, in the SAW sensor 601, for example, in the same way as thefifth embodiment, a middle layer member 517 has a first layer 618A and asecond layer (not shown), and a cutout for forming a passage etc. isformed in the second layer. Due to this, between the first layer 618Aand the upper layer member 619, a space 29 above the sensor chip 409, apassage 611 for guiding the liquid sample to the space 29, and a passage612 for exhaust from the space 29 are formed.

The inflow port 603 is opened in for example the upper surface of oneend of the passage 611 for inflow. The passage 611 for example linearlyextends from the inflow port 603 toward the space 29. The passage 612for exhaust for example linearly extends to the side opposite to thepassage 611 from the space 29 and is communicated with a through hole643.

On the lower surface of the upper layer member 619, in the same way asthe other embodiments, the contact angle to the liquid sample at thedetection part-facing surface 625 b becomes smaller than the contactangle to the liquid sample at the adjacent surface (second region, notshown). For example, in the same way as the fourth and fifthembodiments, on the lower surface of the upper layer member 619, a film635 is provided so as to face the detection part.

Further, in the same way as the fifth embodiment, on the upper surfaceof the first layer 618A, due to the provision of the hydrophilic film orthe like, the contact angle to the liquid sample becomes relativelysmall. That is, the contact angles to the liquid sample at the bottomsurfaces of the passages 611 and 612 are small.

Note that, at the wall surface near the connection portion of the inflowport 603 and the passage 611 as well, preferably the contact angle tothe liquid sample is set small due to the provision of a hydrophilicfilm or the like.

In the constitution as described above as well, effects the same asthose by the first to fifth embodiments are exhibited. For example, thewidth of the liquid sample (y-direction) in the space 29 can becontrolled according to the width of the detection part-facing surface625 b (y-direction), and flow of the liquid sample onto the IDTelectrodes can be suppressed without providing a partition wall.

(Modification of Shape of Passage)

FIG. 14 is a view for explaining a modification of the shape of thepassage which guides the liquid sample onto the detection part and is aperspective view of a middle layer member 717.

The middle layer member 717 is, in the same way as the middle layermembers in the embodiments explained above, a member which areinterposed between the lower layer member and the upper layer member. Apassage 711 for guiding the liquid sample to the detection part isformed by formation of a cutout 717 a in the middle layer member 717.

The cutout 717 a extends with a constant width from the end partconstituting the inflow port up to the position at which a sensor chipis arranged, and includes a portion which corresponds to the first holepart 17 b in the first embodiment as well. Note that, in the passage711, the width (range of y-direction) making the contact angle to theliquid sample small on the bottom surface or ceiling surface may beequal to the width of the cutout 717 a or may be smaller than the widthof the cutout 717 a.

Note that, in the above embodiments, the detection part-facing surfaces25 b, 225 b, 325 b, 425 b, and 625 b are examples of the first region,the electrode-facing surfaces 25 a, 225 a, 325 a, and 425 a are examplesof the second region, the bases 7, 407, and 607 are examples of thepackage, the lower layer member 15 is an example of the lower layerportion, the middle layer members 17 and 517 are examples of the middlelayer portion, and the upper layer member 419 is an example of the upperlayer portion.

The present invention is not limited to the above embodiments and may beexecuted in various ways.

In the embodiments, the case where the SAW sensor had a sensor chip anda base was exemplified, but the SAW sensor may be marketed in the formof only a sensor chip as a finished product.

Note, if configuring the SAW sensor having a sensor chip including acover and a base, for example, the height of the space 29 and the widthof the first region are formed with a high precision, variation of theamount of the liquid sample in the detection part is suppressed, andconsequently the detection precision is improved, while the demand forprecision can be lowered at the relatively large base 7. Therefore acheap SAW sensor having a high detection precision can be realized.

Further, in the first embodiment etc., the cover 25 of the sensor chip 9was exposed from the base 7. However, the base may be constituted sothat the sensor chip 9 is not exposed to the outside as well. Forexample, the base may further have a layer-shaped member which isadhered to the tops of the upper layer member 19 and the cover 25 andhas a through hole communicated with the through hole 43 formed thereinas well.

Further, in the fourth embodiment, the middle layer member 17 waslocated in the four lateral directions of the sensor chip 409 andsurrounded roughly the entire sensor chip 409. Further, in themodification of FIG. 4, the middle layer member 717 was located in thethree lateral directions of the sensor chip. However, the middle layermember only has to be located on at least two sides of the sensor chipin a lateral direction. For example, an inflow path (see FIG. 14) whichextends toward the space above the detection part and has a width equalto the width of the space and an outflow path (or exhaust path) whichextends from the space to the side opposite to the inflow path and has awidth equal to the width of the space may be formed as well.

The lower layer portion and middle layer portion may be integrallyformed, and the upper layer member (upper layer portion) may be coveredon that. In this case as well, the lower layer portion and the middlelayer portion can be differentiated using the surface on which thepiezoelectric substrate is placed as the standard. Further, the middlelayer portion and the upper layer portion may be integrally formed, andthey may be placed on the lower layer member (lower layer portion) aswell. In this case as well, the middle layer portion and the upper layerportion can be differentiated using the upper surface of the space onthe piezoelectric substrate as the standard.

Further, the passage in which the liquid sample flows (including notonly the passage of the base, but also the space of the sensor chip) canbe suitably constituted other than ones exemplified in the aboveembodiments.

Boundaries between the first region and the pair of second regions whichare located on the two sides of the first region in the direction ofalignment of the detection part and the IDT electrodes do not alwayshave to be located between the detection part and the IDT electrodes.For example, the boundaries between the first region and the secondregions may be located on the IDT electrodes or may be located on outersides from the IDT electrodes. Even in such cases, for example, in anSAW sensor allowing the liquid sample to flow onto the IDT electrodes,it is possible to make the liquid sample flow onto the detection partwith a higher priority, the formation of air bubbles on the detectionpart can be suppressed.

On the lower surface of the cover, the contact angle to the liquidsample in the first region only has to be smaller than the contact angleto the liquid sample in the second region. For example, in the firstregion, the contact angle to the liquid sample need not be less than90°. For example, even in a case where the capillary phenomenon is notutilized, so long as the contact angle to the liquid sample in the firstregion is smaller than the contact angles to the liquid sample on theelectrode-facing surfaces, the liquid sample can be made flow onto thedetection part while suppressing flow of the liquid sample onto the IDTelectrodes. However, the introduction of the liquid sample onto thedetection part is easier in the case where the capillary phenomenon isutilized, and it is also easy to control the width (amount) of theliquid sample with a high precision according to the width of the firstregion etc.

Further, in the case where the contact angle to the liquid sample in thefirst region is less than 90°, the contact angle to the liquid sample inthe second region need not be 90° or more. For example, in a trial pieceof the SAW sensor 1 according to the first embodiment, the contactangles at the electrode-facing surfaces 25 a were 70°, and the contactangle at the detection part-facing surface 25 b was 25°. However, theflow of the liquid sample onto the IDT electrodes was sufficientlysuppressed. The reason for this is considered to be the effect of thelow wettability step which is constituted by the thickness of the film35 and adhesive agent 41. Note that, in the case as in the secondembodiment where the electrode-facing surfaces 225 a (second regions)and the detection part-facing surface 225 b (first region) are flush andflow of the liquid sample onto the IDT electrodes is not allowed,preferably the contact angles at the electrode-facing surfaces are 90°or more.

In the embodiments, the first region was constituted by a film orcoating layer and was located in the lower part relative to the secondregions. However, the first region and the second regions may be flushas well. For example, a film or a coating layer may be arranged on acover body having a concave portion formed by the thickness of the filmor coating layer in advance as well.

The pair of IDT electrodes and detection part (metal film) may beprovided not only as a single set, but as two or more sets as well. Forexample, in the first embodiment, the widths of the metal films 55 maybe made equal to those of the detection regions 23 a, and a plurality ofcombinations of IDT electrodes and metal films may be arranged in thex-direction (flow direction of liquid sample). In this case, it ispossible to fix the aptamers to one set of metal film and not fix theaptamers to another set of metal film and compare the two so as tomeasure the change of the SAW due to bonding of the liquid sample andthe aptamers. Further, a different type of aptamers may be fixed to eachmetal film, and the properties or ingredients which are different foreach liquid sample may be measured as well.

In the above embodiments, the explanation was given by using the term(example) of “hydrophilicity”. However, as already mentioned, the sample(liquid sample) is not limited to one containing water. When the sampledoes not contain water, the term “amphiphilicity” may be used in placeof hydrophilicity.

Note that, from the embodiments described in the present description(particularly the first, fourth, and fifth embodiments), anotherinvention can be extracted which is characterized in that the firstregion facing the detection part projects to the piezoelectric substrateside more than a pair of second regions which are located on the twosides of the first region in the direction of alignment of the detectionpart and IDT electrodes.

In this other invention, the contact angle to the liquid sample in thefirst region does not always have to be smaller than the contact anglesto the liquid sample in the second regions. In this other invention, forexample, the height from the piezoelectric substrate to the first regionbecomes lower than the height from the piezoelectric substrate to thesecond region, therefore the capillary phenomenon can be made easier tooccur in the first region than the second region.

REFERENCE SIGNS LIST

-   -   1 . . . SAW sensor (surface acoustic wave sensor), 23 . . .        piezoelectric substrate, 23 a . . . detection region (detection        part), 25 . . . cover, 25 a . . . surface facing electrode, 25 b        . . . surface facing detection part (first region), 45 . . .        first IDT electrode, and 47 . . . second IDT electrode.

1. A sensor, comprising: a substrate; a detection part disposed on anupper surface of the substrate, the detection part being configured todetect a detection object which is contained in a sample which flows ina first passage; and a cover configured to cover the detection partthrough a space which is a part of the first passage, wherein a lowersurface of the cover comprises a first region facing at least a portionof the detection part, and a pair of second regions at both sidesrelative to the first region in a direction crossing a flow direction ofthe first passage, and the first region has a contact angle to thesample smaller than that of the pair of second regions.
 2. The sensoraccording to claim 1, further comprising a pair of electrodes at bothsides relative to the detection part in the direction crossing the flowdirection.
 3. The sensor according to claim 2, further comprising aprotective member covering the detection part and the pair ofelectrodes, wherein the space is configured on the protective member. 4.The sensor according to claim 1, wherein the contact angle of the firstregion to the sample is less than 90°.
 5. The sensor according to claim1, wherein the cover comprises a base material having the first regionand the pair of said second regions, and a film laminated on the firstregion of the base material, and a lower surface of the film has acontact angle to the sample smaller than that of the pair of secondregions.
 6. The sensor according to claim 1, wherein the cover comprisesa base material having the first region and the pair of said secondregions, and a coating layer on a surface of the first region of thebase material, the coating layer comprising a surface having a contactangle to the sample smaller than that of a surface of the base material,and the coating layer is not on surfaces of the pair of second regions.7. The sensor according to claim 1, wherein the pair of second regionsproject downward more than the first region.
 8. The sensor according toclaim 1, wherein the first region projects downward more than the pairof second regions.
 9. The sensor according to claim 2, wherein the pairof second regions face the pair of electrodes, respectively.
 10. Thesensor according to claim 1, wherein the cover comprises a port openingoutward at a side surface of the cover while communicating with thespace.
 11. The sensor according to claim 1, wherein the cover comprisesa hole opening toward the space at the lower surface of the cover whilecommunicating with outside of the cover.
 12. The sensor according toclaim 1, wherein the cover comprises a wall located on a side of thespace while located on the substrate.
 13. The sensor according to claim1, further comprising a package holding the substrate and the covertherein; and a second passage configured to connect outside of thepackage and the space.
 14. The sensor according to claim 13, wherein anupper surface of the second passage is located in a same plane as thefirst region, and the upper surface of the second passage has a contactangle to the sample smaller than that of the pair of second regions. 15.The sensor according to claim 1, further comprising a lower layerportion having an upper surface on which the substrate is located,wherein the cover comprises a middle layer portion on the lower layerportion, the middle layer portion being located at a lateral portion ofthe substrate, and an upper layer portion on the middle layer portion,the upper layer portion being above the substrate and covering thesubstrate.
 16. The sensor according to claim 15, wherein the middlelayer portion comprises a first layer on the lower layer portion, and asecond layer on the first layer, and in the direction crossing the flowdirection, the first layer is closer to the substrate than the secondlayer.
 17. The sensor according to claim 16, wherein, the first layercomprises an exposed surface in an upper surface thereof, the exposedsurface being exposed from the second layers, the exposed surface havinga contact angle to the sample which is smaller than that of the pair ofsecond regions and which is larger than that of the first region. 18.The sensor according to claim 1, comprising a plurality of the detectionparts, wherein the first region faces at least a portion of theplurality of the detection parts.
 19. The sensor according to claim 1,wherein the detection part comprises a metal film on which an aptamer isfixed.
 20. A sensor, comprising: a substrate; a detection part disposedon an upper surface of the substrate, the detection part beingconfigured to detect a detection object which is contained in a samplewhich flows in a first passage; and a cover configured to cover thedetection part through a space which is a part of the first passage,wherein a lower surface of the cover comprises a first region facing atleast a portion of the detection part, and a pair of second regions atboth sides relative to the first region in a direction crossing a flowdirection of the first passage, and the pair of second regions areexposed to the space but project downward more than the first region.21. A sensor, comprising: a substrate; a detection part disposed on anupper surface of the substrate, the detection part being configured todetect a detection object which is contained in a sample which flows ina first passage; and a cover configured to cover the detection partthrough a space which is a part of the first passage, wherein a lowersurface of the cover comprises a first region facing at least a portionof the detection part, and a pair of second regions at both sidesrelative to the first region in a direction crossing a flow direction ofthe first passage, and the first region projects downward more than thepair of second regions.